Lecture - 28 Etching of Si,Sio2,SiN and other materials
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Added: 3 years ago
From: nptelhrd
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  • I have question you didn't explaine DRIE. I would like to know what type of mask can be used in DRIE for etching the Si. I know I can use photoresist but how about SiO2?

    sonia0583 11 months ago

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    sonia0583 11 months ago

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